Research Interests:                                               

Education and Experience:

• Post-Doctoral Researcher: University of California, Berkeley (Sep. 2016-present)
           Department of Chemical & Biomolecular Engineering
           Advisor: Prof. David B. Graves
  
  
• PhD:  University of Illinois at Urbana-Champaign (Aug. 2016)
           Department of Nuclear, Plasma, and Radiological Engineering
           Advisor: Prof. David N. Ruzic
           Dissertation Title: Removal of Sn from Extreme Ultraviolet Collector Optics by an In-Situ Hydrogen Plasma
  
  
• MS:   University of Illinois at Urbana-Champaign (May 2013)
           Department of Nuclear, Plasma, and Radiological Engineering
           Advisor: Prof. David N. Ruzic
           Thesis Title: Magnetic Mitigation of Ionic Debris for Extreme Ultraviolet Lithography Sources
  
  
• BS:    Franklin W. Olin College of Engineering (May 2011)

Journal Publications:

(*Corresponding author )

1. D.T. Elg, G.A. Panici, J.S. Peck, S.N. Srivastava, and D.N. Ruzic, "Modeling and Measurement of Hydrogen Radical Densities of in-situ Plasma-Based Sn Cleaning Source", Journal of Micro/Nanolithography, MEMS, & MOEMS 16(2) (2017).
2. D.T. Elg, J.R. Sporre, G.A. Panici, S.N. Srivastava, D.N. Ruzic, “In-Situ Collector Cleaning and EUV Reflectivity Restoration by Hydrogen Plasma for EUV Sources”, Journal of Vacuum Science & Technology A 34(2) (2016).
3. J.R. Sporre, D.T. Elg, Kishor K. Kalathiparambil, D.N. Ruzic, “Modeling and Measuring the Transport and Scattering of Energetic Debris in an EUV Plasma Source”, Journal of Micro/Nanolithography, MEMS, & MOEMS 15(1) (2016).
4. D.T. Elg, J.R. Sporre, D. Curreli, I.A. Shchelkanov, D.N. Ruzic, K.R. Umstadter., “Magnetic Debris Mitigation System for EUV Sources”, Journal of Micro/Nanolithography, MEMS, & MOEMS 14(1) (2015)
   

Conference Proceedings:

1. D.T. Elg,
   

Conference Presentations:

Honors and Awards:

• Mavis Future Faculty Fellow, 2015.