Postdoctoral ScholarEmail: daniel.elg@berkeley.edu
Research Interests: - Plasma-Material Interactions (both solid & liquid surfaces)
- Nanomaterial Synthesis
- Plasma Diagnostics at atmosphere and at low pressure
- Low-temperature plasma processing
- Design & Control of plasma sources
Education and Experience:
- Post-Doctoral Research:
University of California, Berkeley (Sep. 2016-present)
Department of Chemical & Biomolecular Engineering Advisor: Prof. David B. Graves
- PhD: University of Illinois at Urbana-Champaign (Aug. 2016)
Department of Nuclear, Plasma, and Radiological Engineering Advisor: Prof. David N. Ruzic Dissertation Title: Removal of Sn from Extreme Ultraviolet Collector Optics by an In-Situ Hydrogen Plasma
- MS: University of Illinois at Urbana-Champaign (May 2013)
Department of Nuclear, Plasma, and Radiological Engineering Advisor: Prof. David N. Ruzic Thesis Title: Magnetic Mitigation of Ionic Debris for Extreme Ultraviolet Lithography Sources
- BS: Franklin W. Olin College of Engineering (May 2011)
Electrical and Computer Engineering
Journal Articles:
- D.T. Elg, I. Yang, D.B. Graves, "Production of TEMPO by O Atoms in Atmospheric Pressure Non-Thermal Plasma-Liquid Interactions" (2017).
- D.T. Elg, G.A. Panici, S. Liu, G. Girolami, S.N. Srivasta,
and D.N. Ruzic, "Removal of Tin from Extreme Ultraviolet Collector
Optics by Etching with an In-Situ Hydrogen Plasma" (2017).
- Q. Yang, K. Kalathiparambil, D.T. Elg, D. Ruzic, W.M. Kriven, "Microstructural Damage of α-Al2O3 by High Energy Density Plasma", Acta Materialia 132, 479-490 (2017).
- D.T. Elg, G.A. Panici, J.S. Peck, S.N. Srivastava, D.N. Ruzic, "Modeling and Measurement of Hydrogen Radical Densities of In-Situ Plasma-Based Sn Cleaning Source", Journal of Micro/Nanolithography, MEMS, & MOEMS 16(2) (2017).
- D.T. Elg, J.R. Sporre, G.A. Panici, S.N. Srivastava, D.N. Ruzic, "In-Situ Collector Cleaning and EUV Reflectivity Restoration by Hydrogen Plasma for EUV Sources", Journal of Vacuum Science & Technology A 34(2) (2016).
- J.R. Sporre, D.T. Elg, K.K. Kalathiparambil, D.N. Ruzic, "Modeling and Measuring the Transport and Scattering of Energetic Debris in an EUV Plasma Source", Journal of Micro/Nanolithography, MEMS, & MOEMS 15(1) (2016).
- D.T. Elg, J.R. Sporre, D. Curreli, I.A. Shchelkanov, D.N. Ruzic, K.R. Umstadter, "Magnetic Debris Mitigation System for EUV Sources", Journal of MIcro/Nanolithography, MEMS, & MOEMS 14(1) (2015).
Conference Presentations: - D.T. Elg,
I. Yang, D.B. Graves, "TEMPO Production by O Atoms in Plasma-Liquid
Interactions Driven by Spatio-Temporally Varying Atmospheric Pressure
Plasma Jet", 8th Annual Meeting of the DOE Center for Predictive Control of Plasma Kinetics, Bethesda, MD (2017).
- D.T. Elg, G.A. Panici, D.N. Ruzic, "Study of Sn Removal Processes for In-Situ Collector Cleaning", Poster Presentation, International Symposium on Extreme Ultraviolet Lithography, Hiroshima, Japan (2016).
- D.T. Elg, G.A. Panici, S.N. Srivasta, D.N. Ruzic, "Study of Sn Removal Processes for In-Situ Collector Cleaning", Oral Presentation, SPIE Advanced Lithography, San Jose, CA (2016).
- D.T. Elg, G.A. Panici, S.N. Srivasta, D.N. Ruzic, "In-Situ EUV Collector Cleaning by Hydrogen Plasma", Oral Presentation, International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands (2015).
- D.T. Elg, G.A. Panici, S.N. Srivasta, D.N. Ruzic, "Collector Optic Cleaning by In-Situ Hydrogen Plasma", Poster Presentation, SPIE Advanced Lithography, San Jose, CA (2015).
- D. Elg, S. Srivastava, I. Shchelkanov, D.N. Ruzic, "Collector Cleaning and EUVR Restoration by In-Situ Hydrogen Plasma", Oral Presentation, International Symposium on Extreme Ultraviolet Lithography, Washington, DC (2014).
- D. Elg, S. Srivastava, I. Shchelkanov, D.N. Ruzic "In-Situ Plasma Cleaning Method for Collector Optics", Oral Presentation, SPIE Advanced Lithography, San Jose, CA (2014).
- D. Elg, J. Sporre, D.N. Ruzic, S.N. Srivastava, I.V. Fomenkov, D.C. Brandt, "In-Situ Plasma Cleaning of Collector Optics", Oral Presentation, International Symposium on Extreme Ultraviolet Lithography, Toyama, Japan (2013).
- D. Elg, J. Sporre, D. Curreli, D.N. Ruzic, K.R. Umstadter, "Magnetic Mitigation of Debris from EUV Sources", Poster Presentation, SPIE Advanced Lithography, San Jose, CA (2013).
- J. Sporre, D. Elg, D.N. Ruzic, S.N. Srivastava, I.V. Fomenkov, D.C. Brandt, "Collector Optic In-Situ Sn Removal Using Hydrogen Plasma", Poster Presentation, SPIE Advanced Lithography, San Jose, CA (2013).
- D.N. Ruzic, J. Sporre, D. Elg, D. Curreli, "Contamination Concerns at the Intermediate Focus of an Extreme-Ultraviolet Light Source", Oral Presentation, SPIE Advanced Lithography, San Jose, CA (2013).
- J. Sporre, D. Elg, D. Andruzcyk, T. Cho, D.N. Ruzic, S.N. Srivastava, D.C. Brandt, "In-Situ Sn Contamination Removal by Hydrogen Plasma", SPIE Advanced Lithography, San Jose, CA (2012).
- D. Andruczyk, J. Sporre, D. Elg, T. Cho, D.N. Ruzic, "Energetic Ion and Neutral Energy Analyzer for Extreme-Ultraviolet Light Sources", SPIE Advanced Lithography, San Jose, CA (2012).
- J. Sporre, D. Elg, D. Andruzcyk, T. Cho, D.N. Ruzic, S.N. Srivastava, D.C. Brandt, "Development of an In-Situ Method for Cleaning EUV Collector Optics, International Symposium on Extreme Ultraviolet Lithography, Miami, FL (2011).
Conference Proceedings:
- D.T. Elg, I. Yang, D.B. Graves, "TEMPO Production by O Atoms in
Plasma-Liquid Interactions Driven by Spatio-Temporally Varying
Atmospheric Pressure Plasma Jet", 8th Annual Meeting of the DOE Center for Predictive Control of Plasma Kinetics, Bethesda, MD (2017).
- D.T. Elg, G.A. Panici, S.N. Srivastava, D.N. Ruzic, "Study of Sn Removal Processes for In-Situ Collector Cleaning", Proceedings of SPIE 9776, 97760M (2016).
- D.T. Elg, G.A. Panici, S.N. Srivastava, D.N. Ruzic, "Collector Optic Cleaning by In-Situ Hydrogen Plasma", Proceedings of SPIE 9422, 94222H (2015).
- D. Elg, J. Sporre, D. Curereli, D.N. Ruzic, K.R. Umstadter, "Magnetic Mitigation of Debris from EUV Sources", Proceedings of SPIE 8679, 86792M (2013).
- J.R. Sporre, D. Elg, D.N. Ruzic, S.N. Srivastava, I.V. Fomenkov, D.C. Brandt, "Collector Optic In-Situ Sn Removal Using Hydrogen Plasma", Proceedings of SPIE 8679, 86792H (2013).
- D.N. Ruzic, J. Sporre, D. Elg, D. Curreli, "Contamination Concerns at the Intermediate Focus of an Extreme-Ultraviolet Light Source", Proceedings of SPIE 8679, 86790D (2013).
- J. Sporre, D. Elg, D. Andruczyk, T. Cho, D.N. Ruzic, S.N. Srivastava, D.C. Brandt, "In-Situ Sn Contamination Removal by Hydrogen Plasma", Proceedings of SPIE 8322, 83222L (2012).
- D. Andruczyk, J. Sporre, D. Elg, T. Cho, D.N. Ruzic, "Energetic Ion and Neutral Energy Analyzer for Extreme-Ultraviolet Light Sources", Proceedings of SPIE 8322, 832227 (2012).
Honors and Awards:
- Mavis Future Faculty Fellowship, 2015-2016.
- International EUVL Symposium Student Scholarship, 2014-2015.
- Member of Alpha Nu Sigma, 2013.
- F.W. Olin Scholarship (Full Tuition), 2007-2011.
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