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Dr. Daniel Elg (page in progress)

Postdoctoral Researcher
Email: daniel.elg@berkeley.edu

Research Interests:                                               

  • Plasma-Surface Interactions (both solid & liquid surfaces)
  • Plasma Diagnostics at atmosphere and at low pressure
  • Low-temperature plasma processing
  • Design of plasma sources
  • Control of plasma sources

Education and Experience:

  • Post-Doctoral Researcher: University of California, Berkeley (Sep. 2016-present)
             Department of Chemical & Biomolecular Engineering
             Advisor: Prof. David B. Graves

  • PhD:  University of Illinois at Urbana-Champaign (Aug. 2016)
             Department of Nuclear, Plasma, and Radiological Engineering
             Advisor: Prof. David N. Ruzic
             Dissertation Title: Removal of Sn from Extreme Ultraviolet Collector Optics by an In-Situ Hydrogen Plasma

  • MS:   University of Illinois at Urbana-Champaign (May 2013)
             Department of Nuclear, Plasma, and Radiological Engineering
             Advisor: Prof. David N. Ruzic
             Thesis Title: Magnetic Mitigation of Ionic Debris for Extreme Ultraviolet Lithography Sources

  • BS:    Franklin W. Olin College of Engineering (May 2011)

Journal Publications:

(*Corresponding author )

  1. D.T. Elg, G.A. Panici, J.S. Peck, S.N. Srivastava, and D.N. Ruzic, "Modeling and Measurement of Hydrogen Radical Densities of in-situ Plasma-Based Sn Cleaning Source", Journal of Micro/Nanolithography, MEMS, & MOEMS 16(2) (2017).
  2. D.T. ElgJ.R. Sporre, G.A. Panici, S.N. Srivastava, D.N. Ruzic, “In-Situ Collector Cleaning and EUV Reflectivity Restoration by Hydrogen Plasma for EUV Sources”, Journal of Vacuum Science & Technology A 34(2) (2016).
  3. J.R. Sporre, D.T. Elg, Kishor K. Kalathiparambil, D.N. Ruzic, “Modeling and Measuring the Transport and Scattering of Energetic Debris in an EUV Plasma Source”, Journal of Micro/Nanolithography, MEMS, & MOEMS 15(1) (2016).
  4. D.T. Elg, J.R. Sporre, D. Curreli, I.A. Shchelkanov, D.N. Ruzic, K.R. Umstadter., “Magnetic Debris Mitigation System for EUV Sources”, Journal of Micro/Nanolithography, MEMS, & MOEMS 14(1) (2015)

Conference Proceedings:

  1. D.T. Elg,

Conference Presentations:

Honors and Awards:

  • Mavis Future Faculty Fellow, 2015.
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